Microbeam analysis — Electron probe microanalyser (EPMA) — Guidelines for performing quality assurance procedures

This document provides guidelines for performing routine diagnostics and quality assurance procedures on electron probe microanalysers (EPMA). It is intended to be used periodically by an instrument's operator to confirm that the instrument is performing optimally, and to aid in troubleshooting if it is not. It covers the properties of reference materials required and the analysis procedures necessary to independently test and fully evaluate the functionality of the main components of an EPMA system. The analytical procedure described herein is distinct from single-element diagnostic procedures, which can be performed more rapidly. Such procedures are valid for the diffractor position and conditions under which the test is performed, whereas the procedure described herein is intended to qualify an instrument's capabilities for exploratory analysis of unknowns, trace analysis and non-routine work (such as peak interferences). This document is applicable to EPMA and other wavelength dispersive spectrometer (WDS) systems in which elemental identification and quantification are performed by analysis of the energy and intensity of the characteristic X-ray lines observed in wavelength-dispersed X-ray spectra. It is not directly applicable to elemental analysis using energy dispersive spectrometry (EDS).

Analyse par microfaisceaux — Analyse par microsonde électronique (microsonde de Castaing) — Lignes directrices pour la mise en œuvre des procédures d'assurance qualité

General Information

Status
Published
Publication Date
25-Jul-2018
Current Stage
9093 - International Standard confirmed
Completion Date
14-Dec-2023
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ISO 19463:2018 - Microbeam analysis -- Electron probe microanalyser (EPMA) -- Guidelines for performing quality assurance procedures
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INTERNATIONAL ISO
STANDARD 19463
First edition
2018-07
Microbeam analysis — Electron probe
microanalyser (EPMA) — Guidelines
for performing quality assurance
procedures
Analyse par microfaisceaux — Analyse par microsonde électronique
(microsonde de Castaing) — Lignes directrices pour la mise en œuvre
des procédures d'assurance qualité
Reference number
ISO 19463:2018(E)
©
ISO 2018

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ISO 19463:2018(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2018
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
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Published in Switzerland
ii © ISO 2018 – All rights reserved

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ISO 19463:2018(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 General principles of electron probe microanalyser quality assurance (EPMA QA) .6
4.1 Objective . 6
4.2 Selection of challenge materials. 6
4.2.1 General. 6
4.2.2 General characteristics of analysed materials . 6
4.2.3 Specific characteristics of challenge materials . 7
4.3 QA measurement parameters . 7
4.3.1 General. 7
4.3.2 Laboratory environment preparation . 7
4.3.3 Instrument parameters . 8
4.4 Data acquisition .11
4.5 Frequency of QA diagnostic testing .12
5 Test report .12
6 Data analysis and performance tracking .13
6.1 General .
...

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